1/9/2012	11:55:00 AM	Main Vac valve closed
1/9/2012	11:55:01 AM	H2 valve opened
1/9/2012	11:56:21 AM	H2 valve closed
1/9/2012	11:56:23 AM	Bypass valve opened
1/9/2012	11:57:39 AM	Bypass valve closed
1/9/2012	11:57:40 AM	Main Vac valve opened
1/9/2012	12:05:16 PM	Main Vac valve closed
1/9/2012	12:05:17 PM	H2 valve opened
1/9/2012	12:06:34 PM	H2 valve closed
1/9/2012	12:06:35 PM	Bypass valve opened
1/9/2012	12:07:43 PM	Bypass valve closed
1/9/2012	12:07:44 PM	Main Vac valve opened
1/9/2012	12:43:42 PM	PH3 valve closed
1/9/2012	12:44:19 PM	PH3 valve opened
1/9/2012	4:24:23 PM	Program exited cleanly
1/9/2012	5:29:55 PM	Helium valve closed
1/9/2012	5:29:55 PM	H2 valve closed
1/9/2012	5:29:55 PM	BCl3 valve closed
1/9/2012	5:29:55 PM	PH3 valve closed
1/9/2012	5:29:55 PM	SiCl4 pre valve closed
1/9/2012	5:29:55 PM	SiCl4 post valve closed
1/9/2012	5:29:55 PM	Main Vac valve closed
1/9/2012	5:29:55 PM	Bypass valve closed
1/9/2012	5:29:55 PM	Bubbler valve closed
1/9/2012	5:29:55 PM	Helium MFC set to  0.000000
1/9/2012	5:29:55 PM	H2 MFC set to  0.000000
1/9/2012	5:29:55 PM	BCl3 MFC set to  0.000000
1/9/2012	5:29:55 PM	PH3 MFC set to  0.000000
1/9/2012	5:29:55 PM	SiCl4 MFC set to  0.000000
1/9/2012	5:29:55 PM	Bypass solenoid MFC set to  760.000000
1/9/2012	5:29:55 PM	Tube furnace set to 0
1/9/2012	5:29:57 PM	Bypass valve opened
1/9/2012	5:29:58 PM	Bypass valve closed
1/9/2012	5:29:59 PM	Main Vac valve opened
1/9/2012	5:30:45 PM	PH3 MFC set to  0.500000
1/9/2012	5:31:04 PM	PH3 MFC set to  1.000000
1/9/2012	5:31:11 PM	PH3 MFC set to  1.500000
1/9/2012	5:31:23 PM	PH3 MFC set to  2.000000
1/9/2012	5:31:34 PM	PH3 MFC set to  2.010000
1/9/2012	5:31:58 PM	PH3 MFC set to  20.000000
1/9/2012	5:32:13 PM	PH3 MFC set to  2.010000
1/9/2012	5:32:23 PM	PH3 MFC set to  1.990000
1/9/2012	5:32:53 PM	PH3 valve opened
1/9/2012	5:33:00 PM	Program exited cleanly
1/9/2012	5:38:54 PM	Helium valve closed
1/9/2012	5:38:54 PM	H2 valve closed
1/9/2012	5:38:54 PM	BCl3 valve closed
1/9/2012	5:38:54 PM	PH3 valve closed
1/9/2012	5:38:54 PM	SiCl4 pre valve closed
1/9/2012	5:38:54 PM	SiCl4 post valve closed
1/9/2012	5:38:54 PM	Main Vac valve closed
1/9/2012	5:38:54 PM	Bypass valve closed
1/9/2012	5:38:54 PM	Bubbler valve closed
1/9/2012	5:38:54 PM	Helium MFC set to  0.000000
1/9/2012	5:38:54 PM	H2 MFC set to  0.000000
1/9/2012	5:38:54 PM	BCl3 MFC set to  0.000000
1/9/2012	5:38:54 PM	PH3 MFC set to  0.000000
1/9/2012	5:38:54 PM	SiCl4 MFC set to  0.000000
1/9/2012	5:38:54 PM	Bypass solenoid MFC set to  760.000000
1/9/2012	5:38:54 PM	Tube furnace set to 0
1/9/2012	5:38:59 PM	Main Vac valve opened
1/9/2012	5:39:02 PM	PH3 valve opened
1/9/2012	5:39:03 PM	PH3 valve closed
1/9/2012	5:39:04 PM	PH3 valve opened
1/9/2012	5:39:06 PM	PH3 valve closed
1/9/2012	5:39:09 PM	PH3 valve opened
1/9/2012	5:52:32 PM	PH3 valve closed
1/9/2012	5:52:38 PM	PH3 MFC set to  1.000000
1/9/2012	5:53:21 PM	PH3 MFC set to  2.000000
1/9/2012	5:55:09 PM	PH3 MFC set to  1.000000
1/9/2012	5:55:42 PM	PH3 valve opened
1/9/2012	5:55:55 PM	PH3 MFC set to  0.000000
1/9/2012	5:56:02 PM	PH3 MFC set to  20.000000
1/9/2012	6:02:57 PM	Helium valve closed
1/9/2012	6:02:57 PM	H2 valve closed
1/9/2012	6:02:57 PM	BCl3 valve closed
1/9/2012	6:02:57 PM	PH3 valve closed
1/9/2012	6:02:57 PM	SiCl4 pre valve closed
1/9/2012	6:02:57 PM	SiCl4 post valve closed
1/9/2012	6:02:57 PM	Main Vac valve closed
1/9/2012	6:02:57 PM	Bypass valve closed
1/9/2012	6:02:57 PM	Bubbler valve closed
1/9/2012	6:02:57 PM	Helium MFC set to  0.000000
1/9/2012	6:02:57 PM	H2 MFC set to  0.000000
1/9/2012	6:02:57 PM	BCl3 MFC set to  0.000000
1/9/2012	6:02:57 PM	PH3 MFC set to  0.000000
1/9/2012	6:02:57 PM	SiCl4 MFC set to  0.000000
1/9/2012	6:02:57 PM	Bypass solenoid MFC set to  760.000000
1/9/2012	6:02:58 PM	Tube furnace set to 0
1/9/2012	6:03:02 PM	PH3 MFC set to  20.000000
1/9/2012	6:03:02 PM	PH3 valve opened
1/9/2012	6:03:04 PM	Main Vac valve opened
1/9/2012	10:14:08 PM	H2 MFC set to  500.000000
1/9/2012	10:14:10 PM	Main Vac valve closed
1/9/2012	10:14:11 PM	H2 valve opened
1/9/2012	10:15:27 PM	H2 valve closed
1/9/2012	10:15:28 PM	Bypass valve opened
1/9/2012	10:17:25 PM	Bypass valve closed
1/9/2012	10:17:25 PM	Main Vac valve opened
1/9/2012	10:35:10 PM	PH3 valve closed
1/9/2012	10:35:14 PM	PH3 MFC set to  0.000000
